JPH075055Y2 - 搬送装置の位置決め停止装置 - Google Patents
搬送装置の位置決め停止装置Info
- Publication number
- JPH075055Y2 JPH075055Y2 JP1987098520U JP9852087U JPH075055Y2 JP H075055 Y2 JPH075055 Y2 JP H075055Y2 JP 1987098520 U JP1987098520 U JP 1987098520U JP 9852087 U JP9852087 U JP 9852087U JP H075055 Y2 JPH075055 Y2 JP H075055Y2
- Authority
- JP
- Japan
- Prior art keywords
- stop position
- substrate
- stop
- substrate transfer
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 42
- 238000001514 detection method Methods 0.000 claims description 26
- 238000005259 measurement Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 10
- 239000007788 liquid Substances 0.000 description 9
- 238000007654 immersion Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 101100321304 Bacillus subtilis (strain 168) yxdM gene Proteins 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Control Of Position Or Direction (AREA)
- Special Conveying (AREA)
- Control Of Conveyors (AREA)
- Intermediate Stations On Conveyors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987098520U JPH075055Y2 (ja) | 1987-06-29 | 1987-06-29 | 搬送装置の位置決め停止装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987098520U JPH075055Y2 (ja) | 1987-06-29 | 1987-06-29 | 搬送装置の位置決め停止装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS643719U JPS643719U (en]) | 1989-01-11 |
| JPH075055Y2 true JPH075055Y2 (ja) | 1995-02-08 |
Family
ID=31324866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987098520U Expired - Lifetime JPH075055Y2 (ja) | 1987-06-29 | 1987-06-29 | 搬送装置の位置決め停止装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH075055Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5522477B2 (ja) * | 2010-12-17 | 2014-06-18 | 株式会社ダイフク | 搬送設備 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5077973U (en]) * | 1973-11-19 | 1975-07-07 | ||
| JPS5230686U (en]) * | 1975-08-26 | 1977-03-03 | ||
| JPS6066484U (ja) * | 1983-10-07 | 1985-05-11 | 大日本スクリーン製造株式会社 | 位置決め装置 |
| JPS61155704U (en]) * | 1985-03-19 | 1986-09-27 |
-
1987
- 1987-06-29 JP JP1987098520U patent/JPH075055Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS643719U (en]) | 1989-01-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100426418B1 (ko) | 기기에 시이트를 운반하는 수단을 제어하는 장치 | |
| CN112109967A (zh) | 全自动铝基板覆膜整平生产线 | |
| JP3721866B2 (ja) | 基板位置決め装置およびこれを搭載した塗布機または装着機 | |
| JPH0237778Y2 (en]) | ||
| US8485343B2 (en) | Conveying system having endless drive medium and conveying method | |
| JPH075055Y2 (ja) | 搬送装置の位置決め停止装置 | |
| US5752593A (en) | Belt feeder centering method and apparatus | |
| JPH07106402A (ja) | 板状体搬送装置 | |
| JPH0147364B2 (en]) | ||
| JPH0223109A (ja) | 搬送手段の同期制御方法 | |
| JPH07121765B2 (ja) | 自動組立用搬送装置 | |
| JPH0616222A (ja) | プリント基板多連搬送システム | |
| JP3074396B2 (ja) | タイヤ幅測定方法及びその装置 | |
| JP3376552B2 (ja) | 基板のセンタリング装置 | |
| JP2596482B2 (ja) | 板状物の厚み測定装置 | |
| JPH01144647A (ja) | 半導体ウエハ計数装置 | |
| JPH0367922B2 (en]) | ||
| JPH023434Y2 (en]) | ||
| JP2581085B2 (ja) | ウエ−ハアライメント装置 | |
| JP2627329B2 (ja) | 基板搬送装置 | |
| JP2546439Y2 (ja) | 物品保管システムの搬送テーブルの最適移載位置停止装置 | |
| WO2002046067A1 (fr) | Dispositif permettant d'installer et de transporter une carte a circuit imprime et dispositif permettant de desinstaller et de transporter une carte a circuit imprime | |
| JP2895638B2 (ja) | 搬入ワーク任意寸法位置決め方法 | |
| JPS61183054A (ja) | 自動貼合せ装置に於ける制御方法 | |
| JPH0199229A (ja) | 半導体ウェハーのベルト式搬送装置 |